The HEX Modular Deposition System

Mantis Deposition introduced the HEX in Spring 2013. It is an economical solution to PVD, suitable for teaching as well as research.  It comprises an aluminium frame with six interchangeable panels. The panels can accommodate up to three sources (sputter, thermal boat or e-beam) and a film thickness monitor.  

HEX Deposition system explained

Benchtop Deposition System


The sample stage is built on to an easily removeable top panel with options for heating, rotation and a shutter. The system is pumped with a mini turbo. The HEX may be automated with Mantis' Titanium deposition control software. 

HEX Sputter Source

The HEX Sputter Source


For further details please download the HEX brochure or contact Portsdown Scientific.