The HEX Modular Deposition System
The HEX Deposition system from Korvus Technology is an economical solution to PVD, suitable for teaching as well as research. It comprises an aluminium frame with six interchangeable panels. The panels can accommodate up to three sources (sputter, thermal boat or e-beam) and a film thickness monitor.
Benchtop Deposition System
The 4" sample stage is built into the top panel and has handles for easy removal. There are options for heating, rotation and a shutter. The system is pumped with a mini turbo. The HEX may be automated with Niobium deposition control software.
The HEX Sputter Source