The HEX Modular Deposition System
Mantis Deposition introduced the HEX in Spring 2013. It is an economical solution to PVD, suitable for teaching as well as research. It comprises an aluminium frame with six interchangeable panels. The panels can accommodate up to three sources (sputter, thermal boat or e-beam) and a film thickness monitor.
Benchtop Deposition System
The sample stage is built on to an easily removeable top panel with options for heating, rotation and a shutter. The system is pumped with a mini turbo. The HEX may be automated with Mantis' Titanium deposition control software.
The HEX Sputter Source