The New mini Z UV for Water Vapour Desorption
RBD Instruments has announced a new addition to their line of water vapour desorption systems, the mini Z. This water vapour desorption system comprises a high power ultra-violet C emitter that fits inside a standard 1.5" ID vacuum chamber tube and a compact power supply which mounts directly to the 2.75" CF flange.
The mini Z is ideal for solving water vapour problems in compact vacuum chambers such as load locks, mini ALD chambers, pressure cells, etc. The 185nm UVC radiation power supply is simple to use – just turn it on when you start pumping! A remote ON/OFF option is available if you want to operate the mini Z by a process controller or set point.
Simple, effective and affordable – the mini Z is the perfect solution to water vapor problems in compact vacuum chambers. Produces 350 uW/cm2 @ 6cm from end of emitter (2.75" flange). Also available for 4.5" CF flanges.