Introducing the FDG15 Ion Source from FOCUS GmbH
The FDG15 is designed to clean samples for surface analysis. It may also be used to perform simple depth profiling and even for charge neutralization in ESCA (with the low energy option).
An extremely clean ion beam is ensured by a non-line-of-sight filament, a gas inlet directly into the ionization cage and effective differential pumping. The ionization is done by electron bombardment to allow for a continuous variable beam current from nA to μA.The spot size is variable, down to 300 μm and an integrated port aligner allows easy alignment on the sample.The power supply can be fully controlled by the front panel or via a TCP/IP interface. LabVIEW™ based PC software is provided.